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TEM OBSERVATION OF ION-PLATED Al FILM ON Ni SUBSTRATE

WAN Lijun Dalian Maritime University , Dalian , Liaoning , China CHEN Baoqing Dalian Institute of Technology , Dalian , Liaoning , China GUO Kexin(K.H.KUO) Institute of Metal Research , Academia Sinica , Shenyang , China Institute of Metal and Technology , Dalian Maritime University , Dalian , Liaoning , China

金属学报(英文版)

A new phase was found at the interface between Al film and Ni substrate when the time of ion-plating reaches 5 min.It was identified to be body centered tetragonal lattice with the constants a=b=0.588 nm,c=0.480 nm.The variation of microstructure and phases with the ion-plating time were observed.Based on these results,the ion-plating film formation mech- anism has been also discussed.

关键词: magnetron sputtering , null , null , null

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